Titania-doped quartz glass for nanoimprint molds

Details Titania-doped quartz glass for nanoimprint molds Titania-doped quartz glass for nanoimprint molds

2011-04-12

2011-04-12

Lorengo, Jerry (Department: 1731)

Compositions: ceramic

Ceramic compositions

Glass compositions, compositions containing glass other than...

C501S053000, C501S055000

Reexamination Certificate

active

07923394

ABSTRACT:
In the nanoimprint lithography, titania-doped quartz glass having an internal transmittance distribution of up to 10% at wavelength 365 nm is suited for use as nanoimprint molds.

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Database WPI Week 200701; Thompson Scientific, London, GB; AN 2007-004333; XP002501238 & JP 2006 306674 A (Shinetsu Sekiei KK) Nov. 9, 2006 abstract.

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