Glass manufacturing – Processes – With shaping of particulate material and subsequent fusing...
Reexamination Certificate
2009-07-30
2010-12-14
Rosasco, Stephen (Department: 1795)
Glass manufacturing
Processes
With shaping of particulate material and subsequent fusing...
C430S005000
Reexamination Certificate
active
07849711
ABSTRACT:
A titania-doped quartz glass containing 3-12 wt % of titania at a titania concentration gradient less than or equal to 0.01 wt %/μm and having an apparent transmittance to 440 nm wavelength light of at least 30% at a thickness of 6.35 mm is of such homogeneity that it provides a high surface accuracy as required for EUV lithographic members, typically EUV lithographic photomask substrates.
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V. S. Khotimchenko et al.; “Determining the Content of Hydrogen Dissolved in Quartz Glass Using the Methods of Raman Scattering and Mass Spectrometry”, Zurnal Priladnoi Spectroskopii, vol. 46, No. 6, pp. 987-991, Jun. 1987.
European Search Report dated Apr. 16, 2007, issued in corresponding European Patent Application No. 06256239.
Maida Shigeru
Yamada Motoyuki
Rosasco Stephen
Shin-Etsu Chemical Co. , Ltd.
Westerman Hattori Daniels & Adrian LLP
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