Tip for nanoscanning electron microscope

Details Tip for nanoscanning electron microscope Tip for nanoscanning electron microscope

2005-09-13

2005-09-13

Lee, John R. (Department: 2881)

Radiant energy

Ion generation

Field ionization type

C250S442110

Reexamination Certificate

active

06943356

ABSTRACT:
An apparatus for producing an electron beam, comprising a support structure; a miniature ultrahigh vacuum chamber comprising a superconducting single walled metallic-type carbon nanotube comprised of a cylindrical wall, a proximal end disposed upon and sealed to the support structure, and a distal end comprising an electron-transparent structure; an electron beam emitting tip comprising a second carbon nanotube embedded in the support structure and disposed within the superconducting single walled metallic-type carbon nanotube, the second carbon nanotube having an inner surface with a thin conductive coating disposed thereupon; and means for creating an electrical potential difference the electron beam emitting tip and the cylindrical wall of said superconducting carbon nanotube. There is also provided a scanning electron microscope comprising an enclosed point source electron beam generator disposed within a conically tapered enclosure having a proximal end and a distal end, the proximal end in communication through an opening therein with a vacuum tube, and the distal end comprising a conical pipette tip target opening.

REFERENCES:
patent: 5587586 (1996-12-01), Kruit
patent: 2003/0143453 (2003-07-01), Ren et al.

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