TiO 2 -containing silica glass for optical member for EUV...

Details TiO 2 -containing silica glass for optical member for EUV... TiO 2 -containing silica glass for optical member for EUV...

2010-10-14

2011-10-18

Lorengo, Jerry A (Department: 1731)

Compositions: ceramic

Ceramic compositions

Glass compositions, compositions containing glass other than...

C501S055000

Reexamination Certificate

active

08039409

ABSTRACT:
The present invention provides a TiO2-containing silica glass from which a transparent extremely low thermal expansion glass having excellent transparency and having a temperature region in which the coefficient of thermal expansion is substantially zero can be obtained. The present invention relates to a TiO2-containing silica glass for optical member for EUV lithography, having a TiO2concentration of from 3 to 14% by mass; an internal transmittance per 1-mm thickness in a wavelength region of from 400 to 700 nm, T400-700, of 97% or more; and an internal transmittance per 1-mm thickness in a wavelength region of from 400 to 3,000 nm, T400-3,000, of 70% or more.

REFERENCES:
patent: 7294595 (2007-11-01), Iwahashi et al.
patent: 7410922 (2008-08-01), Iwahashi et al.
patent: 7419924 (2008-09-01), Koike et al.
patent: 7429546 (2008-09-01), Iwahashi et al.
patent: 7462574 (2008-12-01), Iwahashi et al.
patent: 7538052 (2009-05-01), Iwahashi et al.
patent: 7585800 (2009-09-01), Kawata et al.
patent: 7592063 (2009-09-01), Ikuta et al.
patent: 2002/0157421 (2002-10-01), Ackerman et al.
patent: 2007/0042893 (2007-02-01), Koike et al.
patent: 2007/0207911 (2007-09-01), Koike et al.
patent: 2008/0103038 (2008-05-01), Kawata et al.
patent: 2009/0122281 (2009-05-01), Iwahashi et al.
patent: 2010/0089096 (2010-04-01), Tamitsuji et al.
patent: 2010/0234205 (2010-09-01), Ikuta et al.
patent: 1 795 506 (2007-06-01), None
patent: 1 213 603 (1970-11-01), None
patent: 60-176945 (1985-09-01), None
patent: 2007/238425 (2007-09-01), None
patent: 2008-247631 (2008-10-01), None
patent: 2004/089838 (2004-10-01), None
patent: 2005/066090 (2005-07-01), None
patent: 2006/004169 (2006-01-01), None
patent: 2007/032533 (2007-03-01), None
patent: WO 2007/032533 (2007-03-01), None
patent: 2008/156177 (2008-12-01), None
International Search Report issued Aug. 10, 2009, in PCT/JP09/058028 filed Aug. 18, 2009.
U.S. Appl. No. 12/868,900, filed Aug. 26, 2010, Koike, et al.

Affiliated with

Also associated with

Rating

TiO 2 -containing silica glass for optical member for EUV... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with TiO 2 -containing silica glass for optical member for EUV..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and TiO 2 -containing silica glass for optical member for EUV... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4290246