TIO 2 -containing silica glass and optical member for...

Details TIO 2 -containing silica glass and optical member for... TIO 2 -containing silica glass and optical member for...

2010-08-24

2011-10-11

Lorengo, Jerry A (Department: 1731)

Compositions: ceramic

Ceramic compositions

Glass compositions, compositions containing glass other than...

C501S055000, C065S017400, C065S117000

Reexamination Certificate

active

08034731

ABSTRACT:
The present invention is to provide a TiO2—SiO2glass whose coefficient of linear thermal expansion at the time of irradiating with high EUV energy light becomes substantially zero when used as an optical member of an exposure tool for EUVL. The present invention relates to a TiO2-containing silica glass, having a fictive temperature of 1,000° C. or lower, a OH concentration of 600 ppm or higher, a temperature at which the coefficient of linear thermal expansion becomes 0 ppb/° C. of from 40 to 110° C., and an average coefficient of linear thermal expansion in the temperature range of 20 to 100° C., of 50 ppb/° C. or lower.

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