TiO 2 -containing silica glass and optical member for...

Details TiO 2 -containing silica glass and optical member for... TiO 2 -containing silica glass and optical member for...

2011-08-16

2011-08-16

Lorengo, Jerry (Department: 1731)

Compositions: ceramic

Ceramic compositions

Glass compositions, compositions containing glass other than...

C501S056000, C501S057000

Reexamination Certificate

active

07998892

ABSTRACT:
The present invention provides a TiO2—SiO2glass whose coefficient of linear thermal expansion upon irradiation with high EUV energy light is substantially zero, which is suitable as an optical member of an exposure tool for EUVL. The present invention relates to a TiO2-containing silica glass having a halogen content of 100 ppm or more; a fictive temperature of 1,100° C. or lower; an average coefficient of linear thermal expansion in the range of from 20 to 100° C. of 30 ppb/° C. or lower; a temperature width ΔT, in which a coefficient of linear thermal expansion is 0±5 ppb/° C., of 5° C. or greater; and a temperature, at which a coefficient of linear thermal expansion is 0 ppb/° C., falling within the range of from 30 to 150° C.

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