Time of flight electron detector

Details Time of flight electron detector Time of flight electron detector

2006-04-18

2006-04-18

Wells, Nikita (Department: 2881)

Radiant energy

Electron energy analysis

C250S309000, C250S42300F, C250S287000, C315S111810, C378S034000

Reexamination Certificate

active

07030375

ABSTRACT:
Methods and apparatus for determining the material composition of a semiconductor device at an area of interest are described. An electron time-of-flight spectrometer is used within a semiconductor inspection system. The spectrometer is placed on the opposite side of an objective lens from the area of interest. In one embodiment, the electron time-of-flight spectrometer is an electron drift tube. A computing module produces an electron emission spectrum for the materials at the area of interest.

REFERENCES:
patent: 6288394 (2001-09-01), Barnes et al.
patent: 6545272 (2003-04-01), Kondo
patent: 2004/0211896 (2004-10-01), Laprade et al.

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