Time division multiplexed microscopy

Details Time division multiplexed microscopy Time division multiplexed microscopy

1993-02-19

1994-11-29

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356360, 356349, G01B 902

Patent

active

053694899

ABSTRACT:
Optical apparatus for measuring the topographic properties of a surface uses a beam of coherent radiation which is split by a beam splitter (2) into a reference beam and a probe beam. The probe beam at is modulated by a Bragg cell which is switched at two frequencies (.omega..sub.1,.omega..sub.2). A detector (6) recombines the components of the probe beam after reflection to produce a plurality of tone bursts the phase differences of which correspond to variations in the surface topography.

REFERENCES:
patent: 4360271 (1982-11-01), Downs et al.
patent: 4611915 (1986-09-01), Gillard et al.
patent: 4627730 (1986-12-01), Jungerman et al.
patent: 4741620 (1988-05-01), Wickramasinghe
patent: 4743119 (1988-05-01), Ida
Patent Abstracts of Japan, vol. 10, No. 157, Jun. 1986, JP 61 010 707.

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