Tilting adjustable surface profilometer

Details Tilting adjustable surface profilometer Tilting adjustable surface profilometer

2008-03-31

2009-11-17

Sohn, Seung C (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

C382S128000, C356S039000

Reexamination Certificate

active

07619190

ABSTRACT:
The invention relates to a tilting adjustable surface profilometer, comprising an apparatus capable of adjusting an image acquiring angle. The apparatus includes two types of frameworks. One is a translation-stage-type tilting adjustable surface profilometer, which is enabled by the translations of two translation stage with the rotation of a rotary rack, a surface profile with an omni-directional angle of a sample can be obtained. The other framework is a surface profilometer with an arc-trajectory tilting apparatus, which is enabled by guiding the surface profilometer to slide along the arc rails with the rotations of the rotary rack, a surface profile with an omni-directional angle of a sample can be obtained.

REFERENCES:
patent: 5204734 (1993-04-01), Cohen et al.
patent: 6449048 (2002-09-01), Olszak
patent: 7330574 (2008-02-01), Olszak
patent: I229186 (2005-03-01), None

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