Tiltable Z-axis platform based on uni-directional tilt platform

Horizontally supported planar surfaces – Vertically adjustable – Shelf type

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Details

108 20, 10814411, 2481884, A47B 900

Patent

active

06085670&

ABSTRACT:
A uni-directional tilt mechanism for supporting a robotic arm mechanism or other structures includes a simplified system of two motors for tilting a support platform in one dimension. The uni-directional tilt platforms according to the invention may be stacked to provide a universally tiltable stacked platform system for supporting a robotic arm mechanism. The multi-directional tilt stacked platform system can be used to align a Z-axis of a transferred substrate with cassettes or workstations in which substrate is to be placed by the robot.

REFERENCES:
patent: 4602555 (1986-07-01), Bushey
patent: 5794541 (1998-08-01), Hirose

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