Tilt mechanism for wafer cassette

Details Tilt mechanism for wafer cassette Tilt mechanism for wafer cassette

1997-06-04

2000-03-07

Breneman, Bruce

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

118500, 118728, 118729, 2481781, 248133, 414935, 414936, 414937, 414938, 414940, 211 41, 269309, C23F 102, B65G 118

Patent

active

060335211

ABSTRACT:
A tilt mechanism for periodically tilting a cassette configured to hold a plurality of wafers or workpieces such that the wafers or workpieces become gravity-loaded against a rear portion of the cassette. The tilt mechanism is mounted entirely above a worktable of a CMP or other processing machine and comprises a housing which houses a circular cam having a spiral groove formed therein. A tilt arm is pivotally mounted to the housing and extends vertically between a lower end which is adjacent the cam and an upper end which is fixed to a platform supporting a cassette holding a plurality of workpieces. A cam follower is attached to the lower end of the arm and projects into the groove. Rotary motion of the cam effects pivotal movement of the tilt arm which, in turn, effects tilting of the support platform and the cassette.

REFERENCES:
patent: 4805348 (1989-02-01), Arai et al.
patent: 4859137 (1989-08-01), Bonora et al.
patent: 5022619 (1991-06-01), Mamada
patent: 5099614 (1992-03-01), Arai et al.
patent: 5163651 (1992-11-01), Matsumoto
patent: 5246218 (1993-09-01), Yap et al.
patent: 5329732 (1994-07-01), Karlsrud et al.
patent: 5333413 (1994-08-01), Hashimoto
patent: 5498196 (1996-03-01), Karlsrud et al.
patent: 5498199 (1996-03-01), Karlsrud et al.
patent: 5507614 (1996-04-01), Leonov et al.
patent: 5538385 (1996-07-01), Bacchi et al.
patent: 5562524 (1996-10-01), Gill, Jr.
patent: 5616063 (1997-04-01), Okumura et al.
Patent Abstracts of Japan, vol. 018, No. 080 (E-1505), Feb. 9, 1994 & JP 05 291382 (Hitachi Techno Eng. Co. Ltd.), Nov. 5, 1993.
Brown et al., "Substrate Handling Apparatus", Western Electric Technical Digest, No. 45, Jan. 1977, entire document.
"Universal Wafer-Boat-Alignment Fixture", IBM Technical Disclosure Bulletin, vol. 28, No. 11, Apr. 1986, entire document.

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