Tilt-compensated interferometers

Optics: measuring and testing – By light interference – Spectroscopy

Reexamination Certificate

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Reexamination Certificate

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06967722

ABSTRACT:
The tilt-compensated interferometers of the present invention are novel variations of Michelson's interferometer that use tilt- and shear-compensation to provide excellent photometric accuracy even when there are imperfections in the scanning motion used to produce variation of path difference. The tilt-compensation mechanism of the present invention consists of antiparallel reflections from a beamsplitter element and a roof reflector element, which elements are held rigidly in alignment. Several particularly useful embodiments of the invention are described. Other advantages of the present invention include photometric stability and reduced cost because manual alignment is not required. This interferometer has applications in spectrometry, spectral imaging and metrology.

REFERENCES:
patent: 4383762 (1983-05-01), Burkert
patent: 5309217 (1994-05-01), Simon et al.
patent: 6504613 (2003-01-01), Akikuni et al.
W. H. Steel,Interferometry, p. 228, pub. by the Sydics of the Cambridge Univ Press.
D.E. Jennings, Passive Tilt Compensation in an FTS using a double-sided flat retroreflector, Applied Optics, vol. 27, p. 4605, Nov. 15, 1988.

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