Geometrical instruments – Miscellaneous – Light direction
Patent
1995-11-09
1998-09-15
Cuchlinski, Jr., William A.
Geometrical instruments
Miscellaneous
Light direction
33568, 33573, 248562, 2481882, B23Q 1600
Patent
active
058061932
ABSTRACT:
A tilt and motion apparatus capable of high accuracy positioning. An upper stage is spaced apart and moved, both for vertical movement and tilting, relative to a lower stage. The upper stage is supported on the lower stage by three articulated flexures which each move in the vertical direction but are kinematically rigid in the horizontal plane. Each articulated flexure has three arms connected in a Z shape and both flexure ends are fixed to a base structure mounted on the lower stage. A voice coil motor with one element mounted on the flexure and a second cooperating element on the lower stage pushes against each flexure, which is also connected to the upper stage, away from the lower stage. Thus, the upper stage is very stiff in the horizontal direction. Additionally, at least one air cylinder is connected between the upper stage and lower stage to provide a constant counterforce to the upper stage to support its weight. This prevents the voice coil motors from having to support the weight of the upper stage, hence decreasing the heat generated by their operation.
REFERENCES:
patent: 4320943 (1982-03-01), Link
patent: 4559717 (1985-12-01), Scire et al.
patent: 4597182 (1986-07-01), Rinn
patent: 4770531 (1988-09-01), Tanaka et al.
patent: 4887788 (1989-12-01), Fischer et al.
patent: 4958438 (1990-09-01), Hemmelgarn
patent: 5207097 (1993-05-01), Gutman
patent: 5280677 (1994-01-01), Kubo et al.
patent: 5360195 (1994-11-01), Young
Cuchlinski Jr. William A.
Hirshfeld Andrew
Klivans Norman R.
Nikon Corporation
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