Tilt and movement apparatus using flexure and air cylinder

Geometrical instruments – Miscellaneous – Light direction

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Details

33568, 33573, 248562, 2481882, B23Q 1600

Patent

active

058061932

ABSTRACT:
A tilt and motion apparatus capable of high accuracy positioning. An upper stage is spaced apart and moved, both for vertical movement and tilting, relative to a lower stage. The upper stage is supported on the lower stage by three articulated flexures which each move in the vertical direction but are kinematically rigid in the horizontal plane. Each articulated flexure has three arms connected in a Z shape and both flexure ends are fixed to a base structure mounted on the lower stage. A voice coil motor with one element mounted on the flexure and a second cooperating element on the lower stage pushes against each flexure, which is also connected to the upper stage, away from the lower stage. Thus, the upper stage is very stiff in the horizontal direction. Additionally, at least one air cylinder is connected between the upper stage and lower stage to provide a constant counterforce to the upper stage to support its weight. This prevents the voice coil motors from having to support the weight of the upper stage, hence decreasing the heat generated by their operation.

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