Tiling of modulator arrays

Details Tiling of modulator arrays Tiling of modulator arrays

2006-09-12

2006-09-12

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C430S005000

Reexamination Certificate

active

07106417

ABSTRACT:
In one embodiment, a pixel arrangement may be configured for a maskless lithography application using at least two array tiles, where each array tile includes a two-dimensional array with substantially equally-spaced pixels. A preferred embodiment includes two 500×1000 pixel array tiles separated by a displacement in a first direction and by another displacement in a second direction. In this embodiment, the scanning direction is between the first and second directions so as to form a continuous swath. Additionally, embodiments of this invention can be applied to applications where array tiles of optical modulators are used to modulate electron beams which can subsequently expose electron beam sensitive media.

REFERENCES:
patent: 6060224 (2000-05-01), Sweatt et al.
patent: 6185107 (2001-02-01), Wen
patent: 6215578 (2001-04-01), Lin
patent: 6762867 (2004-07-01), Lippert et al.
patent: 6831768 (2004-12-01), Cebuhar et al.
patent: 6870554 (2005-03-01), Jain
patent: 2005/0046819 (2005-03-01), Bleeker et al.

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