Electrical resistors – With base extending along resistance element – Resistance element coated on base
Patent
1998-06-29
2000-11-28
Easthom, Karl D.
Electrical resistors
With base extending along resistance element
Resistance element coated on base
338306, 25252021, 25251912, 427101, H01C 1012
Patent
active
061541192
ABSTRACT:
Thin films of Ti--Cr--Al--O are used as a resistor material. The films are rf sputter deposited from ceramic targets using a reactive working gas mixture of Ar and O.sub.2. Resistivity values from 10.sup.4 to 10.sup.10 Ohm-cm have been measured for Ti--Cr--Al--O film <1 .mu.m thick. The film resistivity can be discretely selected through control of the target composition and the deposition parameters. The application of Ti--Cr--Al--O as a thin film resistor has been found to be thermodynamically stable, unlike other metal-oxide films. The Ti--Cr--Al--O film can be used as a vertical or lateral resistor, for example, as a layer beneath a field emission cathode in a flat panel display; or used to control surface emissivity, for example, as a coating on an insulating material such as vertical wall supports in flat panel displays.
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Jankowski Alan F.
Schmid Anthony P.
Carnahan L. E.
Easthom Karl D.
The Regents of the University of California
Thompson Alan H.
Wooldridge John P.
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