Gas separation: processes – With control responsive to sensed condition – Concentration sensed
Patent
1998-01-07
1999-11-09
Spitzer, Robert
Gas separation: processes
With control responsive to sensed condition
Concentration sensed
95104, 95133, 96111, 96115, 96144, B01D 5304
Patent
active
059806087
ABSTRACT:
An apparatus for storage and dispensing of a gas, comprising a gas storage and dispensing vessel holding a physical sorbent medium and gas adsorbed on the physical sorbent medium, wherein a carrier gas, e.g., helium, hydrogen, argon, etc., is flowed through the vessel to effect desorption of the sorbate gas and entrainment of the desorbed gas in the carrier gas stream. The storage and dispensing system of the invention may be employed to provide the dispensed sorbate gas to a downstream locus of use in applications such as epitaxial film formation and ion implantation, in the manufacture of semiconductor devices.
REFERENCES:
patent: 240423 (1881-04-01), James
patent: 1608155 (1926-11-01), Barnebey
patent: 1714245 (1929-05-01), Schaefer
patent: 2356334 (1944-08-01), Maude et al.
patent: 2450289 (1948-09-01), Marek
patent: 2663626 (1953-12-01), Spangler
patent: 2987139 (1961-06-01), Bush
patent: 2997371 (1961-08-01), Wadsworth et al.
patent: 3006153 (1961-10-01), Cook
patent: 3080307 (1963-03-01), Rinald
patent: 3093564 (1963-06-01), Weisman et al.
patent: 3116132 (1963-12-01), Haller et al.
patent: 3144200 (1964-08-01), Taylor et al.
patent: 3176444 (1965-04-01), Kiyonaga
patent: 3264803 (1966-08-01), Read
patent: 3287432 (1966-11-01), Sensel
patent: 3415069 (1968-12-01), Hauser
patent: 3469375 (1969-09-01), Barrington et al.
patent: 3675392 (1972-07-01), Reighter
patent: 3713273 (1973-01-01), Coffee
patent: 3719026 (1973-03-01), Sand
patent: 3788036 (1974-01-01), Lee et al.
patent: 4023701 (1977-05-01), Dockery
patent: 4168149 (1979-09-01), Armond et al.
patent: 4263018 (1981-04-01), McCombs et al.
patent: 4343770 (1982-08-01), Simons
patent: 4414005 (1983-11-01), DeBievre et al.
patent: 4477265 (1984-10-01), Kumar et al.
patent: 4552571 (1985-11-01), Dechene
patent: 4578256 (1986-03-01), Nishino et al.
patent: 4673415 (1987-06-01), Stanford
patent: 4723967 (1988-02-01), Tom
patent: 4738693 (1988-04-01), Tom
patent: 4738694 (1988-04-01), Godino et al.
patent: 4744221 (1988-05-01), Knollmueller
patent: 4749384 (1988-06-01), Nowobilski et al.
patent: 4761395 (1988-08-01), Tom et al.
patent: 4869733 (1989-09-01), Stanford
patent: 4881958 (1989-11-01), Eckardt et al.
patent: 5051117 (1991-09-01), Prigge et al.
patent: 5089244 (1992-02-01), Parent et al.
patent: 5114440 (1992-05-01), Reiss
patent: 5133787 (1992-07-01), Diot et al.
patent: 5151395 (1992-09-01), Tom
patent: 5202096 (1993-04-01), Jain
patent: 5224350 (1993-07-01), Mehra
patent: 5238469 (1993-08-01), Briesacher et al.
patent: 5294246 (1994-03-01), Gardner, Sr.
patent: 5385689 (1995-01-01), Tom et al.
patent: 5409526 (1995-04-01), Zheng et al.
patent: 5417742 (1995-05-01), Tamhankar et al.
patent: 5518528 (1996-05-01), Tom et al.
patent: 5704965 (1998-01-01), Tom et al.
patent: 5837027 (1998-11-01), Olander et al.
"Beaded Carbon UPS Solvent Recovery," Chemical Engineering, vol. 84, No. 18 pp. 39-40, Aug. 29, 1977.
Dietz James
McManus James V.
Advanced Technology & Materials Inc.
Hultquist Steven J.
Spitzer Robert
Zitzmann Oliver A.M.
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