Through-the-lens confocal height measurement

Details Through-the-lens confocal height measurement Through-the-lens confocal height measurement

1995-01-06

1996-08-06

Pham, Hoa Q.

Optics: measuring and testing

By polarized light examination

With light attenuation

G01B 1124

Patent

active

055439187

ABSTRACT:
Apparatus and method for measuring a change in the height of a surface or the distance between two surfaces. The invention involves converging a light beam having a beam axis and a focus onto the said surface; scanning the focus of the light beam across the surface along the beam axis using a scanning means; measuring intensity of light reflected from the surface during the scanning; determining a maximum of the light intensity; assigning to the maximum of the light intensity a position of the scanning means; repeating these steps to monitor a change in the position of the scanning means assigned to the maximum of the light intensity; and correlating such change in the position of the scanning means to a change in the height of the surface.

REFERENCES:
patent: 3715165 (1973-02-01), Smith
patent: 3768910 (1973-10-01), Zanoni
patent: 4204772 (1980-05-01), Balasubramanian
patent: 4355904 (1982-10-01), Balasubramanian
patent: 4640620 (1987-02-01), Schmidt
patent: 4748335 (1988-05-01), Lindow et al.
patent: 4874955 (1989-10-01), Uesugi et al.
patent: 4900940 (1990-02-01), Nakamura
patent: 5033856 (1991-07-01), Nose et al.
patent: 5151609 (1992-09-01), Nakagawa et al.

Affiliated with

Also associated with

Rating

Through-the-lens confocal height measurement does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Through-the-lens confocal height measurement, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Through-the-lens confocal height measurement will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2195159