Three way switching controller

Details Three way switching controller Three way switching controller

1995-08-14

1997-03-04

Larson, James

Fluid handling

Systems

Sequentially closing and opening alternately seating flow...

251 77, F16K 717

Patent

active

056069944

ABSTRACT:
A three way switching controller (1) for handling high purity gas, and the like, used for a semiconductor manufacturing plant, and the like, prevents lines on switching sides thereof from communicating with each other at time of switching. The three way switching controller includes a body (2), first and second valves (3 and 4), a cylinder (5), and a linking mechanism (6), with the linking mechanism including a disengagement device (7). The cylinder, operating through the linking mechanism, alternately opens and closes normally-closed valves. The disengagement device prevents a driving force of the cylinder from being applied at once to the valves upon initiation of operation of the cylinder, thereby allowing both of the valves to be in a free state (closed state).

REFERENCES:
patent: 3018797 (1962-01-01), Parks
patent: 3298395 (1967-01-01), Lewis
patent: 3332440 (1967-07-01), Brakebill
patent: 3974861 (1976-08-01), Goto et al.
patent: 4867201 (1989-09-01), Carten
patent: 5065665 (1991-11-01), Kimura

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