Optics: measuring and testing – By light interference – Having light beams of different frequencies
Reexamination Certificate
2011-07-12
2011-07-12
Lyons, Michael A (Department: 2877)
Optics: measuring and testing
By light interference
Having light beams of different frequencies
C356S498000, C356S503000, C356S517000
Reexamination Certificate
active
07978336
ABSTRACT:
An optical system includes more than two optical interferometers that generate interference phenomena between optical waves to measure a plurality of distances, a plurality of thicknesses, and a plurality of indices of refraction of a sample. An electromagnetic detector receives an output of the optical interferometers to render a magnified image of at least a portion of the sample. A controller reduces or eliminates undesired optical signals through a hierarchical phase unwrapping of the output of the electromagnetic detector.
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Bingham Philip R.
Mann Christopher J.
Brinks Hofer Gilson & Lione
Lyons Michael A
UT-Battelle LLC
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