Measuring and testing – Gas analysis – By thermal property
Reexamination Certificate
2006-05-16
2009-08-25
Fitzgerald, John (Department: 2856)
Measuring and testing
Gas analysis
By thermal property
C073S035010
Reexamination Certificate
active
07578167
ABSTRACT:
A three-wafer channel or column structure for a fluid analyzer. The structure may have a support member, membrane, or support wafer containing heaters and interactive elements. The membrane may have a channel of one wafer facing the interactive element side and a space of another wafer facing the other side. The membrane may have perforations to equalize the pressures on both sides of the membrane. A detector in the membrane may have exposure to both the channel and space for good sensitivity, as the sample may be on both sides of the membrane. The wafers may be bonded with a thin film of non-flowing viscous material. Capillaries may be attached to an inlet and outlet of the channel and be parallel to an elongated dimension of the channel.
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Fuggerth, End
Bonne Ulrich
Higashi Robert
Fitzgerald John
Fredrick Kris T.
Honeywell International , Inc.
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