Three plate silicon-glass-silicon capacitive pressure transducer

Details Three plate silicon-glass-silicon capacitive pressure transducer Three plate silicon-glass-silicon capacitive pressure transducer

1983-08-29

1984-08-21

Griffin, Donald A.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

73718, H01G 700, G01L 912

Patent

active

044673949

ABSTRACT:
A three plate silicon-glass-silicon capacitive pressure transducer includes a conductive silicon diaphragm and substrate relatively spaced by a dielectric body having disposed therein a central electrode positioned between the diaphragm and substrate to form a pressure responsive capacitance with the diaphragm at a value inversely proportional to a pressure signal applied to a pressure sensing surface of the diaphragm.

REFERENCES:
patent: 3634727 (1972-01-01), Polye
patent: 3858097 (1974-12-01), Polye
patent: 4198670 (1980-04-01), Mann
patent: 4380041 (1983-04-01), Ho
patent: 4424713 (1984-01-01), Kroninger et al.

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