Three plate integrated circuit capacitor

Details Three plate integrated circuit capacitor Three plate integrated circuit capacitor

1987-05-26

1988-03-15

Griffin, Donald A.

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

29 2542, 357 51, H01G 410, H01G 700, H01L 21225

Patent

active

047316969

ABSTRACT:
A capacitor is described having a very low voltage coefficient of capacitance and a relatively large capacitance per unit area. A process is detailed for forming such a capacitor on an IC. The process is fully compatible with conventional IC processing and does not add substantially to the number of steps.

REFERENCES:
patent: 3886415 (1975-05-01), Genthe
patent: 4475964 (1984-10-01), Ariizumi et al.
patent: 4589056 (1986-05-01), Stimmell
patent: 4628405 (1986-12-01), Lippert
I.B.M. Technical Disclosure Bulletin, Nov. 1974, vol. 17, No. 6, pp. 1569-1570.

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