Three modes particle detector

Details Three modes particle detector Three modes particle detector

2008-05-30

2010-12-07

Wells, Nikita (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

With detector

C250S310000, C250S398000, C250S399000, C250S3960ML, C250S491100

Reexamination Certificate

active

07847268

ABSTRACT:
The invention discloses a charged particle detecting apparatus for detecting positive ions, negative ions and electrons emitted from a sample, the apparatus comprising a housing, defining a chamber in its interior, which is confined by conductive walls, and has an opening to the outside of said housing; a grid for selectively attracting charged particles, wherein the grid is electrically biasable with respect to said housing and functionally aligned with said opening; a converter arrangement with a converter surface, which is electrically biasable with respect to the grid and with respect to the housing, and which is positioned such that charged particles attracted into the chamber by the grid impact on the converter surface; an electron detector, which is biasable with respect to the converter surface in such a way that electrons emitted from the converter surface impact on the electron detector.

REFERENCES:
patent: 7009187 (2006-03-01), Gerlach et al.
patent: 7417235 (2008-08-01), Schon et al.
patent: 2008/0308742 (2008-12-01), Gerlach et al.

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