Three-grid ion-optical system

Electric lamp and discharge devices – With positive or negative ion acceleration – Plural apertured electrodes

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315 537, H01J 2318

Patent

active

055593917

ABSTRACT:
The present invention relates to an ion-optical system for a gas-discharge ion source, the system comprising a screen grid and an accelerator grid each constituted by a respective frame and a set of wires held parallel by supports and fixed to said frames by means of springs, the frames and the grids being assembled together by means of insulators to which they are fixed. According to the invention, the system further comprises a decelerator grid constituted by a frame and a set of wires, the frame of the decelerator grid being engaged in the frame of the accelerator grid and being separated therefrom by insulators. The supports of the wires are constituted either by a comb-shaped plate or by rollers with at least one of the rollers installed in the screen grid being shaped so as to be barrel-shaped, having a larger diameter in its center than at its ends. The pitch of the wires of the screen grid is preferably determined in such a manner as to ensure that the outermost beams converge towards the central beam by a predetermined amount.

REFERENCES:
patent: 4841197 (1989-06-01), Takayama et al.
patent: 5017835 (1991-05-01), Oechsner
Davydenko et al., "Study of a four-electrode multiple-slit system for ion-beam formation.", Instruments and Experimental Techniques 24:(5)1116-1117, 1981.
Zhuravleve et al., "Cold-cathode gas-discharge ion source.", Instruments and Experimental Techniques 28:(4)907-909, 1985.

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