Three-dimensional structure and its manufacturing method

Details Three-dimensional structure and its manufacturing method Three-dimensional structure and its manufacturing method

2007-01-18

2010-11-02

Benson, Walter (Department: 2837)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S340000, C310S345000

Reexamination Certificate

active

07825567

ABSTRACT:
A plurality of micro three-dimensional structure elements each having a movable structure fixed on a sacrifice layer, and fixation portions of the micro three-dimensional structure elements for the sacrifice layer are arranged into a film-like elastic body, and then the sacrifice layer is removed. Thus, a three-dimensional structure in which the individual micro three-dimensional structure elements are arranged independently of one another within the elastic body is manufactured.

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Kentaro Noda et al., “Fabrication of the Flexible Sensor Using SOI Wafer by Removing the Thick Silicone Layer”, Category 3, Fabrication and Packaging Technologies, Reference No. 0857, Jan. 22, 2006.

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