Three-dimensional shape measuring method, and...

Optics: measuring and testing – Shape or surface configuration – Triangulation

Reexamination Certificate

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C356S625000

Reexamination Certificate

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06862097

ABSTRACT:
A three-dimensional shape measuring method and a three-dimensional shape measuring apparatus of excellent measurement accuracy. An optical system comprises a light source, a pattern forming unit which is disposed on the optical axis of the light source to form slit light from the light from the light source, and a projection lens to collect the slit light on the object for measurement. An asymmetric diaphragm having an aperture in which the size in the direction perpendicular to the slit direction is smaller than the size in the slit direction is provided in order to stop the slit light. An image pickup optical system is provided to measure the three-dimensional shape of the object for measurement on the basis of the slit light reflected from the object for measurement.

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