Three-dimensional shape measuring apparatus

Details Three-dimensional shape measuring apparatus Three-dimensional shape measuring apparatus

1999-03-08

2000-08-22

Font, Frank G.

Optics: measuring and testing

By polarized light examination

With light attenuation

G01B 1124

Patent

active

06108090&

ABSTRACT:
A three-dimensional shape measuring apparatus using a confocal imaging system which has a new means for changing the distance in the Z direction between the object and the object-position-in-focus, instead of an object stage moved in the Z direction. This means shifts the object-position-in-focus in the Z direction by refraction. One means inserts a plurality of transparent flat plates between the objective lens and the object-position-in-focus in turn. Another means uses a transparent flat plate made of a material for which the refractive index changes according to the voltage applied and is disposed between the object and the object-position-in-focus.

REFERENCES:
patent: 5644141 (1997-07-01), Hooker et al.
patent: 5687031 (1997-11-01), Ishihara
patent: 5737084 (1998-04-01), Ishihara

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