Three-dimensional shape measuring apparatus

Details Three-dimensional shape measuring apparatus Three-dimensional shape measuring apparatus

1990-04-30

1991-07-23

Evans, F. L.

Optics: measuring and testing

By polarized light examination

With light attenuation

2502012, G01B 1124

Patent

active

050338560

ABSTRACT:
A three-dimensional shape measuring apparatus having a high performance and a reduced drive energy is disclosed. At least a portion of an in-focus state detection optical system having an internal light source is movable while maintaining a light path near an object lens of the optical system. A distance of movement of the movable portion which is moved with auto-focusing operation for an object is measured and the three-dimensional shape is measured precisely with a high stroke. An inclination angle measuring optical system which shares the light path near the object lens with the in-focus state detection optical system and has an internal light source is provided in a common casing. Thus, the distance of movement of the movable part of the in-focus state detection optical system and an inclination angle are simultaneously measured so that the three-dimensional shape can be more precisely measured.

REFERENCES:
patent: 3762821 (1973-10-01), Bruning et al.
patent: 3847485 (1974-11-01), Zanoni
patent: 4374324 (1983-02-01), Van Rosmalen et al.
Frosch et al, IBM Technical Disclosure Bulletin, vol. 15, No, 2, Jul. 1972, pp. 504 and 505.

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