Three-dimensional shape measuring apparatus

Details Three-dimensional shape measuring apparatus Three-dimensional shape measuring apparatus

1996-09-26

1998-04-07

Font, Frank G.

Optics: measuring and testing

By polarized light examination

With light attenuation

G01B 1124

Patent

active

057370842

ABSTRACT:
A three-dimensional shape measuring apparatus which has an improved arrayed confocal imaging system.
A three-dimensional shape measuring apparatus using a confocal imaging system which has a new means for changing the distance in the Z direction between the object and the object-position-in-focus, instead of an object stage moved in the Z direction. This means shifts the object-position-in-focus in the Z direction by refraction. One means inserts a plurality of transparent flat plates between the objective lens and the object-position-in-focus in turn. Another means uses a transparent flat plate made of a material for which the refractive index changes according to the voltage applied and is disposed between the object and the object-position-in-focus.
A three-dimensional shape measuring apparatus using a confocal imaging system wherein an image processor estimates the position from which the intensity of the reflected light for each pixel of the confocal image becomes maximum by interpolation of a value from the curve of the relationship between the intensity of light detected and the distance from the object-position-in-focus to an object point.

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