Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2007-06-18
2009-08-18
Lyons, Michael A (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
C356S497000
Reexamination Certificate
active
07576869
ABSTRACT:
The present invention provides a three-dimensional shape measurement method and a three-dimensional shape measurement apparatus. Color luminance data I (x, y) is separated by an arithmetic processing unit into R, G and B which are color components of a color image. Then, maximum amplitude values are calculated, and the maximum values are composed to obtain an in-focus color omnifocal image. Further, a Z-position corresponding to the maximum amplitude value in an interferogram is calculated in at least one color component, and this processing is performed for all pixels (x, y) to calculate height information for a sample. The height information is provided to the color omnifocal image, such that the three-dimensional shape of the sample can be measured.
REFERENCES:
patent: 5133601 (1992-07-01), Cohen et al.
patent: 6501553 (2002-12-01), Ogawa et al.
patent: 2008/0111996 (2008-05-01), Takeda et al.
patent: 2007-033216 (2007-02-01), None
S.C. Chim, Stanley et al., “Three-dimensional image realization in interference microscopy” Applied Optics/vol. 31, No. 14, May 10, 1992.
Lyons Michael A
Olympus Corporation
Scully , Scott, Murphy & Presser, P.C.
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