Three dimensional scanning system

Details Three dimensional scanning system Three dimensional scanning system

1992-09-16

1994-01-04

Lerner, Martin

Optical: systems and elements

Deflection using a moving element

Using a periodically moving element

359210, 359900, 358208, 250234, G02B 2608

Patent

active

052765466

ABSTRACT:
A part scanning and part calibration method for the inspection of printed circuit boards and integrated circuits includes a camera and two rotating mirrors to scan an image of a pattern mask retical upon which a precise pattern has been deposited. Small parts are placed upon the retical to be inspected. The third overhead mirror is provided to view the part under inspection from another perspective. The scene of the part is triangulated and the dimensions of the system can thus be calibrated. A precise retical mask is provided with dot patterns which provide an additional set of information needed for calibration. By scanning more than one dot pattern the missing state values can be resolved using an iterative trigonomic solution.

REFERENCES:
patent: 4714830 (1987-12-01), Usui
patent: 5032924 (1991-07-01), Brown et al.

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