Three dimensional profile inspecting apparatus

Details Three dimensional profile inspecting apparatus Three dimensional profile inspecting apparatus

2011-07-26

2011-07-26

Nguyen, Sang (Department: 2886)

Optics: measuring and testing

Inspection of flaws or impurities

C356S237200, C356S609000, C250S201300

Reexamination Certificate

active

07986402

ABSTRACT:
A three-dimensional profile inspecting apparatus includes at least two optical inspecting apparatuses and a tilt angle adjusting mechanism. The tilt angle adjusting mechanism is equipped with the at least two optical inspecting apparatuses so as to adjust the tilt angles of the at least two optical inspecting apparatuses. When the tilt angles of the optical inspecting apparatuses are changed, the focuses of the optical inspecting apparatuses remain at a single position and a subject to be inspected is within the fields of view of the optical inspecting apparatuses. The three-dimensional profile of the subject can be obtained by building the images collected by the two optical inspecting apparatuses.

REFERENCES:
patent: 4185298 (1980-01-01), Billet et al.
patent: 4739175 (1988-04-01), Tamura
patent: 5583948 (1996-12-01), Shibayama
patent: 5638461 (1997-06-01), Fridge
patent: 5691764 (1997-11-01), Takekoshi et al.
patent: 5852298 (1998-12-01), Hatakeyama et al.
patent: 6373520 (2002-04-01), Cadieux et al.
patent: 6449048 (2002-09-01), Olszak
patent: 6525810 (2003-02-01), Kipman
patent: 6954274 (2005-10-01), Sasaki et al.
patent: 6987561 (2006-01-01), Reznichenko et al.
patent: 7619190 (2009-11-01), Kuo et al.
patent: 7719672 (2010-05-01), Kohayase et al.
patent: 2005/0025353 (2005-02-01), Kaneko et al.
patent: 9-311021 (1997-12-01), None
patent: 2007309718 (2007-11-01), None
patent: 1229186 (2005-03-01), None
Aric Shorey, William Kordonski, Marc Tricard, “Deterministic, Precision Finishing of Domes and Conformal Optics,” Proceedings of SPIE vol. 5786, pp. 310-318.

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