Three dimensional processing for monolithic IMPATTs

Details Three dimensional processing for monolithic IMPATTs Three dimensional processing for monolithic IMPATTs

1984-07-13

1986-06-24

Hearn, Brian E.

Metal working

Method of mechanical manufacture

Assembling or joining

148DIG75, 148DIG135, 357 13, 357 16, 357 56, 357 76, 29576J, 29576W, 29580, 29591, H01L 2912, H01L 2940

Patent

active

045960690

ABSTRACT:
The disclosure relates to a monolithic circuit and method of making same which includes the use of two substrates of different semiconductor materials or two substrates of the same semiconductor material wherein the processing steps required for certain parts of the circuit are incompatible with the processing steps required for other parts of the circuit.

REFERENCES:
patent: 3383760 (1968-05-01), Shwartzman
patent: 3427515 (1969-02-01), Blicher et al.
patent: 4258375 (1981-03-01), Hsieh et al.
patent: 4278986 (1981-07-01), Mader

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