Three-dimensional multichip module

Active solid-state devices (e.g. – transistors – solid-state diode – Housing or package – Multiple housings

Reexamination Certificate

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C257S723000, C257S724000

Reexamination Certificate

active

07986033

ABSTRACT:
A three-dimensional multichip module includes a first integrated circuit chip having at least one first high-temperature functional area and one first low-temperature functional area, and at least one second integrated circuit chip having a second high-temperature functional area and a second low-temperature functional area. The second high-temperature functional area is arranged opposite the first low-temperature functional area. As an alternative, at least one low-temperature chip having only one low-temperature functional area can also be arranged between the first and second chips.

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Pozder, S., et al., “Back-End Compatibility of Bonding and Thinning Processes for a Wafer-Level 3D Interconnect Technology Platform,” Interconnect Technology Conference, 2004, International Proceedings of the IEEE 2004, Jun. 7-9, 2004, pp. 102-104, IEEE.

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