Three-dimensional measuring apparatus and three-dimensional meas

Details Three-dimensional measuring apparatus and three-dimensional meas Three-dimensional measuring apparatus and three-dimensional meas

1997-08-07

1998-11-24

Font, Frank G.

Optics: measuring and testing

By polarized light examination

With light attenuation

356381, 250230, 25055919, 25055927, 25055906, G01B 1124, G01B 1106, G01D 530, G01N 2100

Patent

active

058415394

ABSTRACT:
The three-dimensional measuring apparatus of the present invention includes an optical beam scanning unit for scanning a projected-and-depressed surface of an object with an optical beam while controlling the scanning operation, and a detector unit for receiving a reflected optical beam reflected by the projected-and-depressed surface through the scanning operation and for thereby measuring height information on the projections and depressions of the object, in which noise information due to noise generated during the control of the scanning operation with the optical beam is prevented from being transmitted as the height information from the detector unit.

REFERENCES:
patent: 4118127 (1978-10-01), Klein et al.
patent: 5008558 (1991-04-01), Koshinaka et al.
patent: 5245403 (1993-09-01), Kato et al.

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