Coating processes – Coating by vapor – gas – or smoke
Patent
1997-07-14
1999-11-30
Meeks, Timothy
Coating processes
Coating by vapor, gas, or smoke
4272555, 427282, 2041921, 20419212, 20429811, 20429823, C23C 1404
Patent
active
059939044
ABSTRACT:
A method of vacuum depositing a layer or layers on a substrate includes controlling thickness distribution of the layer or layers over the substrate by a three-dimensional mask (64) located between the substrate 48 and a vapor source (56). A plurality of conduits (52) extends through the mask from one side to the other for allowing passage of gaseous coating material from a source to the substrate. The length of the conduits is inversely related to the throughput of the conduits for gaseous coating material, and thus the amount of gaseous coating material transmitted by the conduits. The conduit lengths are graded over the mask to provide corresponding gradation of a deposited layer.
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Coherent Inc.
Meeks Timothy
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