Three dimensional inspection system

Details Three dimensional inspection system Three dimensional inspection system

1997-05-05

2000-04-25

Pham, Hoa Q.

Optics: measuring and testing

By polarized light examination

With light attenuation

356394, 3562371, 382146, 348126, G01B 1124, G06K 900

Patent

active

060550546

ABSTRACT:
A part inspection and calibration method for the inspection of printed circuit boards and integrated circuits includes a camera to image a precision pattern mask deposited on a transparent reticle. Small parts are placed on or above the transparent reticle to be inspected. An overhead mirror or prism reflects a side view of the part under inspection to the camera. The scene of the part is triangulated and the dimensions of the system can thus be calibrated. A precise reticle mask with dot patterns gives an additional set of information needed for calibration. By imagining more than one dot pattern the missing state values can be resolved using an iterative trigonometric solution. The system optics are designed to focus images for all perspectives without the need for an additional focusing element.

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CI-8250, The Complete High-Speed Inspection System, ICOS' Products, 6 pages .

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