Three-dimensional imaging technique with occlusion avoidance

Details Three-dimensional imaging technique with occlusion avoidance Three-dimensional imaging technique with occlusion avoidance

1990-05-02

1991-09-17

Rosenberger, Richard A.

Optics: measuring and testing

By polarized light examination

With light attenuation

382 41, 382 8, G01B 1124

Patent

active

050489658

ABSTRACT:
A three-dimensional image of the features on a surface (21) of a substrate (22) is obtained by first spanning the surface with a pair of lines of light (42 and 44), each directed from opposite sides to illuminate each of successive pairs of spaced-apart stripes (46,48) of surface area. The intensity of the light reflected from each successive strip (27) contiguous to, and lying between, the strips illuminated by the first lines of light is sensed. The surface (21) is next spanned with a second pair of lines of light (58,60) directed from opposite sides. The intensity of light reflected from each successive strip contiguous to, and lying between, the successive strips illuminated by the second pair of lines of light is sensed. A three-dimensional image of the substrate surface can be obtained from a prescribed relationship between the two sensed intensities.

REFERENCES:
patent: 4502785 (1985-03-01), Truax
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patent: 4965665 (1990-10-01), Amir
B. Carrihill and R. Hummel, "Experiments with the Intensity Ratio Depth Sensor," Computer Vision, Graphics, and Image Processing, 32, 337-358 (1985).

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