Three-dimensional form measuring apparatus and method

Optics: measuring and testing – By polarized light examination – With light attenuation

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356394, G01B 1124

Patent

active

056710569

ABSTRACT:
A three-dimensional form measuring apparatus of the present invention comprises (i) an optical distance measuring equipment for irradiating an object to be measured with slit-like irradiation light and for receiving, on a two-dimensional light receiving sensor, reflected light from the object; (ii) a position setting mechanism for setting a relative positional relationship between the optical distance measuring equipment and the object; (iii) a signal selecting section which detects whether or not the width and maximum luminance of an optical image reflected by the object are within a predetermined range and thereby selects, as an output signal for preparing data, an output signal of the two-dimensional light receiving sensor concerning the relative positional relationship between the optical distance measuring equipment and the object set by the position setting mechanism; and (iv) a form data preparing section which prepares a three-dimensional form data of the object based on the output signal of the two-dimensional light receiving sensor selected by the signal selecting section. Accordingly, errors in measurement caused by the inclination of the measuring surface are reduced, whereby the three-dimensional form of the object can be stably measured with a high accuracy.

REFERENCES:
patent: 4111557 (1978-09-01), Rottenkolber et al.
patent: 5129010 (1992-07-01), Higuchi et al.
patent: 5280542 (1994-01-01), Ozeki et al.
patent: 5369490 (1994-11-01), Kawai et al.
patent: 5548405 (1996-08-01), Motosugi

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