Three-dimensional displacement measurement apparatus and method

Details Three-dimensional displacement measurement apparatus and method Three-dimensional displacement measurement apparatus and method

1992-03-19

1994-04-05

Wills, Davis L.

Optics: measuring and testing

For optical fiber or waveguide inspection

356356, 356357, 356358, 356363, 33503, 33551, G01N 2101

Patent

active

053010035

ABSTRACT:
A three-dimensional displacement measurement apparatus includes a planar displacement measurement portion which measures a displacement of a measurement point on a surface of a measurement object in the direction of an X-Y plane, a vertical displacement measurement portion which measures a displacement of the surface in a vertical direction with respect to the X-Y plane, and a vertical displacement measurement position compensation portion that tracks a displacement of the measurement point on the X-Y plane.

REFERENCES:
patent: 4957369 (1990-09-01), Antonsson

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