Three-axis motion tracking interferometer for measurement and co

Details Three-axis motion tracking interferometer for measurement and co Three-axis motion tracking interferometer for measurement and co

1994-01-12

1995-05-30

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356359, 356360, 356363, G01B 1102

Patent

active

054196310

ABSTRACT:
A three-axis motion tracking interferometer for use with an article under test (AUT) is provided for measurement and correction of position errors between the AUT and a near-field probing sensor due to thermal drift. The probing sensor is positioned at a plurality of points relative to the AUT to perform a phase front measurement of the AUT. Periodically, the probing sensor is positioned at a subset of the plurality of points, the subset being sufficient to define a geometric surface, such as a plane, cylinder, or sphere. A distance change measurement is performed between the AUT and the probing sensor at each of the subset of points, and three-axis components of relative motion between the AUT and the probing sensor are calculated based upon the distance change measurement. The phase front measurement of the AUT can then be corrected based upon the three-axis components.

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Near-Field Antenna Measurements, by Dan Slater, 1991 Artech House, Inc., Chapter 4.4, "Phase Reference Thermal Compensation", pp. 75-76.

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