Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent
1992-11-06
1995-01-24
Noland, Tom
Measuring and testing
Speed, velocity, or acceleration
Acceleration determination utilizing inertial element
361280, G01P 15125
Patent
active
053833643
ABSTRACT:
An acceleration sensor comprises an upper semiconductor substrate having a rigid frame, four deformable beams connected with the rigid frame, and a weight portion supported by the plurality of deformable beams, a lower semiconductor substrate bonded to the rigid frame, a plurality of movable electrodes attached to the weight portion, and electrically isolated from one another, and a plurality of stationary electrodes attached to the second semiconductor substrate, and opposite to the plurality of movable electrodes for forming a plurality of variable capacitors, and the center of gravity of the weight portion is spaced from a common neutral surface of the four beams for allowing acceleration to produce bending moment exerted on the four beams, thereby causing the variable capacitors to independently change the capacitance.
REFERENCES:
patent: 4345474 (1982-08-01), Deval
patent: 4483194 (1984-11-01), Rudolf
patent: 4736629 (1988-04-01), Cole
patent: 5095752 (1992-03-01), Suzuki et al.
patent: 5134881 (1992-08-01), Henrion et al.
patent: 5243861 (1993-09-01), Kloeck et al.
Kondo Yuji
Takahashi Masaji
Kwok Helen C.
NEC Corporation
Noland Tom
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