Three axes accelerometer

Details Three axes accelerometer Three axes accelerometer

1994-07-12

1996-01-30

Chapman, John E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

7351418, 7351424, G01P 15125

Patent

active

054873053

ABSTRACT:
A three axis accelerometer includes a semiconductor substrate with a plurality of layers of conductive material formed thereon by semiconductor manufacturing techniques, with each layer defining a plane and mounted in parallel spaced relation to each other. A first of the layers is fixedly mounted and a second layer is mounted for limited movement relative to the first layer with the first and second layers forming a first capacitance varying in accordance with acceleration of the accelerometer along a first axis defined by the first and second layers. A plurality of first surfaces and a plurality of electrically isolated plates are formed as a portion of the first and the second layers, respectively, and positioned in parallel juxtaposition, with the plates being moveable relative to the first layer. The first surfaces and the plates defining mutually orthogonal second and third axes with each other and the first axis and forming capacitances which vary in accordance with acceleration in the second and third axes.

REFERENCES:
patent: 4342227 (1982-08-01), Petersen et al.
patent: 4941354 (1990-07-01), Russell et al.
patent: 5249465 (1993-10-01), Bennett et al.

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