Thiourea- and cyanide-free bath and process for electrolytic...

Details Thiourea- and cyanide-free bath and process for electrolytic... Thiourea- and cyanide-free bath and process for electrolytic...

2006-12-19

2006-12-19

King, Roy (Department: 1742)

Electrolysis: processes, compositions used therein, and methods

Electrolytic erosion of a workpiece for shape or surface...

Electrolyte composition or defined electrolyte

C205S667000, C205S674000

Reexamination Certificate

active

07150820

ABSTRACT:
An aqueous thiourea-free gold etching bath for electrolytically etching gold from a microelectronic workpiece. One embodiment of the aqueous thiourea-free bath contains: (a) about 0.5–1.5 M iodide; (b) about 0.1–0.3 M sulfite; and (c) about 1.0–3.0 g/L wetting agent. The bath is useful in a process for electrolytically etching gold from a microelectronic workpiece. A tool system in which the baths and processes of the present invention may be used is also described.

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