Thiol compound, copolymer and method for producing the...

Organic compounds -- part of the class 532-570 series – Organic compounds – Sulfur containing

Reexamination Certificate

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C568S061000, C568S065000

Reexamination Certificate

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07411097

ABSTRACT:
By resolving objections in the prior art, provided are a novel copolymer suitable as a coating polymers which is excellent in adhesion to a substrate and can be used suitably as the polymer for the coating film having durability against pattern collapse in the finer pattern formation for progressed lithography technology and a method for producing the copolymer, as well as a novel thiol compound useful as a chain transfer agent in the production of the copolymer. The novel thiol compound of the present invention has the structure represented by the formula (1);wherein R1is a bivalent substituent selected from linear, branched or cyclic saturated hydrocarbon having 1 to 15 carbon atoms.

REFERENCES:
patent: 5527827 (1996-06-01), Delorme et al.
Tepienicheva et al. Russian Chemical Bulletin,(1997), 46(4), 755-758.

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