Thinning of specimens for examination under the electron microsc

Details Thinning of specimens for examination under the electron microsc Thinning of specimens for examination under the electron microsc

1982-03-29

1985-04-09

Smith, Alfred E.

Radiant energy

Electrically neutral molecular or atomic beam devices and...

250311, G01N 132

Patent

active

045103860

ABSTRACT:
Heretofore specimens have been thinned to penetration for examination by electron microscopy techniques, by ion erosion techniques. Such technique finds particular suitability to eroding materials made of glass, ceramics, and geological specimens which cannot be treated by chemical etchants. The present disclosure while acknowledging the advances which ion erosion techniques have made in this field, is concerned with a more rapid technique employing a beam or beams comprised solely of neutral particles. In tests carried out using this technique the sputtering rate from a sample specimen has been shown to be several percentages greater using a neutral source than from an ion source with the same flux density.

REFERENCES:
patent: 3657542 (1972-04-01), Futch, Jr. et al.
patent: 4128765 (1978-12-01), Franks
patent: 4284952 (1981-08-01), Fink
patent: 4340815 (1982-07-01), Franks

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