Thinning agent supplying systems

Details Thinning agent supplying systems Thinning agent supplying systems

2006-09-19

2006-09-19

Lamb, Brenda A. (Department: 1734)

Coating apparatus

With treatment of coating material

By separation

C096S155000

Reexamination Certificate

active

07108750

ABSTRACT:
Thinning agent supplying systems for use with spin-coating machines are disclosed. An example supplying system enables the stable supply of thinning agent for cleaning a wafer. The example system includes an input terminal; first and second tanks for receiving the thinning agent from the input terminal; first and second valves for controlling discharge of the thinning agent from the first and second tanks; a pressure-exerting unit for applying pressurized gas to discharge the thinning agent from the first and/or second tanks; and a de-gas unit for removing bubbles from the thinning agent discharged from the first and/or second tanks.

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