Thin semiconductor film gas sensor device

Details Thin semiconductor film gas sensor device Thin semiconductor film gas sensor device

2004-04-23

2008-10-28

Williams, Hezron E. (Department: 2856)

Measuring and testing

Gas analysis

Detector detail

Reexamination Certificate

active

07441440

ABSTRACT:
The gas sensor device of the semiconductor film type comprises, on a single face of it, at least one gas sensor, a resistive heating film and pads for electrical contact of the sensors and of the resistive heating film; the heating element, the gas sensor film and the contact pads are made entirely by sputter deposition.

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