Thin-plate supporting container with unitary porous gasket

Details Thin-plate supporting container with unitary porous gasket Thin-plate supporting container with unitary porous gasket

1998-06-30

2000-08-22

Gehman, Bryon P.

Special receptacle or package

Holder for a removable electrical component

For a semiconductor wafer

206711, 220378, 220806, B65D 8530, B65D 4306, B65D 5300

Patent

active

061057819

ABSTRACT:
A carrier box serving as a thin-plate supporting container includes a container body for defining therein a chamber for supporting and housing therein a plurality of semiconductor wafers and a lid for covering the container body. In one embodiment, the carrier box includes an internal-pressure adjusting mechanism for maintaining the internal pressure in the chamber at the same level as that of the external pressure against the chamber. The internal-pressure adjusting mechanism is composed of an opening formed in a wall of the container body and a filter detachably mounted in the opening for removing foreign matters while allowing gas to easily enter and exit the chamber so as to maintain the chamber in a clean state. In another embodiment, the carrier box includes a gasket made of a porous material. The gasket is provided between the container body and the lid for removing foreign matters while allowing gas to easily enter and exit the chamber so as to maintain the chamber in a clean state while maintaining the internal pressure in the chamber at the same level as that of the external pressure against the chamber.

REFERENCES:
patent: 3092249 (1963-06-01), Chapman
patent: 3425193 (1969-02-01), Emmerson
patent: 4609103 (1986-09-01), Bimer et al.
patent: 4666479 (1987-05-01), Shoji
patent: 4738905 (1988-04-01), Collins
patent: 4830182 (1989-05-01), Nakazato et al.
patent: 4896590 (1990-01-01), Groos
patent: 5353949 (1994-10-01), Seibert et al.
patent: 5469963 (1995-11-01), Bonora et al.
patent: 5472086 (1995-12-01), Holliday et al.
patent: 5476176 (1995-12-01), Gregerson et al.
patent: 5482161 (1996-01-01), Williams et al.
patent: 5573567 (1996-11-01), Schauwecker et al.
patent: 5611452 (1997-03-01), Bonora et al.
patent: 5740845 (1998-04-01), Bonora et al.

Affiliated with

Also associated with

Rating

Thin-plate supporting container with unitary porous gasket does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Thin-plate supporting container with unitary porous gasket, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Thin-plate supporting container with unitary porous gasket will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-570631