Thin plate supporting container clamping device

Handling: hand and hoist-line implements – Grapple – Fixed and moveable jaw

Reexamination Certificate

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Reexamination Certificate

active

07665787

ABSTRACT:
The invention provides a thin plate supporting container clamping device for fixing a thin plate supporting container when the thin plate supporting container in which semiconductor wafers are stored therein for transportation is placed on a loading port at a destination thereof for unloading and loading the semiconductor wafers automatically, including a hook member to be engaged with a retaining member of the thin plate supporting container; a drive unit for supporting the retracted thin plate supporting container in a state in which the hook member is supported so as to be capable of moving in the vertical direction and the hook member is engaged with the retaining member; and a control unit for adjusting a force to retract the hook member. The control unit adjusts the force to retract the hook member on the basis of detection values of a thickness sensor, a position sensor, and a retracting force detection sensor.

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patent: 5611452 (1997-03-01), Bonora et al.
patent: 6501070 (2002-12-01), Bacchi et al.
patent: 6595075 (2003-07-01), Shien et al.
patent: 7433050 (2008-10-01), Sakamoto
patent: 7621714 (2009-11-01), Miyajima et al.
patent: 2002/0051701 (2002-05-01), Saeki et al.
patent: 2003/0029479 (2003-02-01), Asano
patent: 2003/0111912 (2003-06-01), Binnard et al.
patent: 2003/0142281 (2003-07-01), Nishi
patent: 2003/0169412 (2003-09-01), Hazelton
patent: 2005/0095098 (2005-05-01), Miyajima et al.
patent: 2003-297903 (2003-10-01), None

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